Method for compensating the position offset of a capacitive inertial sensor, andcapacitive inertial sensor

摘要

The inertial sensor (1') comprises a stator (2) and a rotor (4) made of semiconductor material and electrostatically coupled together, and a microactuator (24) also made of semiconductor material, coupled to the rotor (4) and controlled so as to move the rotor (4) itself and thus compensate the position offset thereof.;Rotor and stator are provided with interdigitated fingers and constitute capacitive elements. Manufacturing tolerances lead to a positional offset which results in a difference of the capacitances in the absence of acceleration. The actuator consists of interdigitated fingers which provide a force that rotates the rotor back to its nominal zero position. No interference exists between the capacitive elements of rotor and stator and the capacitive elements of the actuator.