Field emission display device using vertically-aligned carbon nanotubes and manufacturing method thereof

摘要

A field emission display (FED) device using vertically-aligned carbon nanotubes is provided. In this FED device, a metal film (32) for use as a cathode is formed on a lower substrate (30), and vertically-aligned carbon nanotubes (34) for use as emitter tips are formed on the metal film (32). Here, the carbon nanotubes for use as emitter tips are obtained by vertically growing on catalytic metal particles by chemical vapor deposition after the catalytic metal particles are formed on the metal film. A spacer (36) is installed on the metal film (32), and an upper substrate (50), to which a transparent electrode and a fluorescent layer are attached, is formed on the spacer (36).