ADSORB TYPED CONTAMINATION PREVENTING PLATE AND DEVICE FOR SAVING LN2 IN SHROUD

摘要

PURPOSE: An adsorb typed contamination preventing plate and a device for saving LN2 in shroud is provided to save LN2 through installing an electronic opening/closing valve at an LN2 supply tube and through installing a gas tank at higher location of the shroud. CONSTITUTION: A copper tube(2) is installed on a copper plate(1) to flow LN2 through the tube for lowering temperature of the plate. An electronic opening/closing valve(30) is installed at inlet of the tube while installing a gas tank(31) at outlet. The valve is opened/closed according to temperature detected by a temperature sensor at upper unit of tube/tank. The gas tank is installed higher than the tube. Diameter of the tank is more than 10 times of the tube while storing twice of LN2. And, a GN2 purifying valve(33) is installed adjacent to the electronic opening/closing valve.