POLYMER WAVEGUIDE GRATING WAVELENGTH DIVISION OPTICAL DEVICE INTEGRATED WITH OPTICAL DETECTOR USING GALLIUM ARSENIDE BOARD AND FABRICATION METHOD THEREOF

摘要

PURPOSE: A polymer waveguide grating wavelength division optical device using a GaAs board and a fabrication method thereof are provided to improve the property of the device, and to achieve the integration with the other active device. CONSTITUTION: A n-GaAs lower clad layer(2), an i-lnGaAs absorption layer(3), a p-GaAs upper clad layer(4), and a p-lnGaAs layer(5) are formed on a n-GaAs substrate using a semiconductor thin film deposition equipment for forming an optical detector device. A waveguide of the optical detector device is patterned using an optical etching method. The area around the pattern is coated using a polyimide, thereby limiting the electric property of the optical detector device. A p-ohmic metal layer is formed on the optical detector device, and a n-ohmic metal layer(8) is formed under the optical detector device. A SiNx thin film is deposited on the whole GaAs substrate. A polymer optical waveguide lower clad layer(9), a polymer optical waveguide core layer(10), and a polymer optical waveguide upper clad layer(12) are successively formed using a spin coating method. The polymer material deposited on the optical detector device and the SiNx thin film are removed using a BOE etching solution. A cross section for input and output of a light wave is formed using a cleaving method and a polishing method. In this way, the fabrication of the optical detector device is completed.