POLYPHENYLENE OLIGOMER, COATING METHOD OF POLYPHENYLENE OLIGOMER, AND PRODUCT CONTAINING CURED PRODUCT OF POLYPHENYLENE OLIGOMER

摘要

PURPOSE: A polyphenylene oligomer composition, a method for preparing an integrated circuit and a coated product from the composition, and an integrated circuit product are provided, which composition has a capability for filling gaps and for flattening a patterned surface, needs a small amount of dispense volume, and is useful as an interlayer dielectric in an integrated circuit. CONSTITUTION: The composition comprises a curable oligomer:£A|w£B|z£EG|v (A is formula(1) and B is formula(2)) selected from a reaction product of at least one polyfunctional compounds containing at least two diene groups and at least one polyfunctional compounds containing at least two compounds containing a dienophile group, and a reaction product of polyfunctional aromatic compounds containing at least one cyclopentadiene group and at least one acetylene group; and s solvent selected from the group consisting of N-methylpyrrolidone, -butyrolactone, mesitylene, cyclohexanone and their mixtures. The curable oligomer has a number average molecular weight of 3,500 or more and a mass average molecular weight of 5,400 or more.