Method of Production of Composited Particle Composited Particle Produced by This Method and Aqueous Dispersion for Chemical Mechanical Polishing Containing This Composited Particle and Method of Production of Aqueous Dispersion for Chemical Mechanical Polishing

摘要

PURPOSE: Provided are a process for preparing a composite particle useful as an abrasive, a composite particle prepared through this process, and an aqueous dispersion for grinding chemical machines which contains this composite particle, yields a sufficient abrasion speed and sufficiently inhibits scratching, disconnection, or the like. CONSTITUTION: The composite particle is obtained by forming a pre-particle wherein an inorganic particle such as alumina, titania, or the like, is attached to a polymer particle having a carboxyl group or its anion, a sulfonate group or its anion or the like, or a pre-particle wherein an inorganic particle such as silica, zirconia, or the like, is attached to a polymer particle having an amino group or its cation or the like, and subsequently polycondensing an organosilicone compound such as tetramethoxysilane, tetraethoxysilane or the like, or an organic metal compound such as tetramethoxy titanium, triethoxy aluminum or the like, in the presence of this pre-particle to bind the polycondensate to the pre-particle. Furthermore, this composite particle is dispersed in an aqueous medium to obtain an aqueous dispersion for grinding chemical machines.