AN IMPROVED KNUDSEN CELL FOR DEPOSITION OF POLYMER THIN FILMS

摘要

PURPOSE: A Knudsen cell is provided which not only solves the problems of an existing Knudsen cell such as lower deposition efficiency of a polymer material and deterioration of productivity accordingly but also improves a sample heating method so that the sample is sufficiently evaporated and temperature control is possible as well. CONSTITUTION: In a Knudsen cell improved for depositing a polymer thin film, the Knudsen cell comprises an H beam shaped cylindrical sample container for carrying a sample; heating sources for heating the side surface of the sample container and the H beam horizontal part of the sample container in which the sample is stacked; and a shielding external appearance (16) on the inner surface of which the heating sources are mounted, and at the part of the upper end surface of which an emitting diameter (20) is formed for sealing the cylindrical sample container, wherein the cylindrical sample container is made of a metal having a heat conductivity, the heating sources comprises a ring-shaped foil heater (12) mounted onto the inner surface of the shielding external appearance (16) for heating the side surface of the cylindrical sample container; and a halogen lamp (14) mounted onto the inner surface of the shielding external appearance oppositely directed to the H beam horizontal part for heating the H beam horizontal part of the sample container, the shielding external appearance is made of stainless steel, and a temperature sensor is loaded in the H beam horizontal part of the sample container for controlling heating of the heating sources.