METHOD FOR MEASURING OFFSET METHOD FOR DETECTING TOOL LOCATION AND A BONDING APPARATUS

摘要

PURPOSE: To exactly execute the measurement of tool position in offset correction. CONSTITUTION: The axis center 4a of a tool 4 is made access to a reference member 30, a reference pattern L is cast on the tool 4 by turning on a laser diode 15 and the shift quantity of the reference member 30 and the tool 4 in X-direction is measured based on the image of the reference pattern L projected on the tool 4. The image of the tool 4 in Y-direction (direction facing to the paper surface) is photographed with a position detection camera 7 and the shift quantity of the reference member 30 and the tool 4 in Y-direction is measured. By moving the position detection camera 7 to make access to the reference member 30, the shift quantity between the light axis 7a of the position detection camera 7 and the reference member is measured with the position detection cemera 7. Based on the measured values and the moving values, exact offset quantity is obtained.