Device for determining deformations on an object surface, in particular a diffusely scattering object surface, and use of the device

摘要

The device has a measuring head (8), which includes an interferometer (14) to generate an interference pattern. An electronic image sensor is arranged in the beam path of the interferometer, to measure the interference pattern. An illumination unit (E) has a group of laser diodes (2,3), which are arranged so that they generate a common light spot on the object to be tested. An Independent claim is included for a method for using the device.