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In the position - measuring method and device using a position marker and processing means for correcting a position on the basis of a result, or a measuring position error using a position marker

机译:在使用位置标记的位置测量方法和装置以及用于基于结果或使用位置标记的测量位置误差来校正位置的处理装置中

摘要

Index marks (21-24) is fixed with predetermined accuracy with respect to image information detector means (1, 2). When image detector means (1) having a narrow field of vision can detect the index marks (21-24), the image information is used to determine the position error of a workpiece (7). When the image detector means (1) is not able to detect the index marks (21-24), image detector means (2) having a wide field of vision detects the index marks (21-24), and the image information is used to determine the position error of a workpiece (7), which in turn is used to correct the relative position between the image detector means (2) and the workpiece (7). The image detector means (1) having a narrow field of vision then seeks image information about the index marks (21-24) to determine the position error of the workpiece (7).
机译:相对于图像信息检测装置(1、2)以预定的精度固定索引标记(21-24)。当具有较窄视野的图像检测器装置(1)能够检测到索引标记(21-24)时,该图像信息用于确定工件(7)的位置误差。当图像检测器装置(1)不能检测到索引标记(21-24)时,具有宽视野的图像检测器装置(2)检测索引标记(21-24),并使用图像信息。确定工件(7)的位置误差,该误差又用于校正图像检测装置(2)和工件(7)之间的相对位置。然后,具有狭窄视野的图像检测器装置(1)寻找关于索引标记(21-24)的图像信息,以确定工件(7)的位置误差。

著录项

  • 公开/公告号DE19882963T1

    专利类型

  • 公开/公告日2001-05-10

    原文格式PDF

  • 申请/专利权人 MITSUBISHI DENKI K.K. TOKIO/TOKYO;

    申请/专利号DE1998182963T

  • 发明设计人 MORI TOSHIHIRO;

    申请日1998-12-22

  • 分类号G01B11/00;G06T7/00;H05K3/00;

  • 国家 DE

  • 入库时间 2022-08-22 01:10:34

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