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Sensor for atomic force microscope, has at least one source magnetic field and at least one magnetic field detector used to measure movement on-and-off of opposite sides of bending element
Sensor for atomic force microscope, has at least one source magnetic field and at least one magnetic field detector used to measure movement on-and-off of opposite sides of bending element
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机译:原子力显微镜传感器,具有至少一个源磁场和至少一个磁场检测器,用于测量弯曲元件相对侧的上下运动
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摘要
Sensor includes a bending element and a needle fastened to the bending element. At least one source magnetic field and at least one magnetic field detector e.g. SQUID are used to measure the movement on-and-off of the opposite sides of the bending element. An Independent claim is also included for a method of determining the movement of a sensor for an atomic force microscope.
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