Pressure sensor membrane has central region coupled to tensioning edge via several concentric annular zones offset in alternating radial directions relative to membrane plane

摘要

The membrane (3) has a circular central region (3d) and a tensioning edge (3e) joined together by several relatively offset concentric annular zones (3a-3c), which are angled in alternating radial directions relative to the membrane plane, with a stepped edge (8) between each 2 adjacent annular zones. An Independent claim for a pressure sensor with a pressure membrane is also included.