Apparatus and fine positioning of a component and coordinates - measuring machine with a device for the fine positioning of a component

摘要

A device for the fine positioning of a component (18) has a symmetrical, a one-piece double parallel spring - element (1) with a suspended at bending points (10), movable middle bar (6), which carries the component. The middle bar (6), by means of an elastic element (11) in the direction of the frame (3) biased. With a between the middle bar (6) and the frame (3) arranged - finely adjusting element (11), the middle bar (6) is almost ideal, can be adjusted without tilting. A highly accurate coordinates - a measuring instrument with a measuring table (31) for receiving a substrate to be measured (35), a reflected light - and / or transmitted light - illumination device (37, 40; 42, 43) and an imaging optics with a vertical optical axis (38) has such a fine positioning device with a vertically arranged double parallel spring - element (1) on. At the middle bar (6) is an objective holder (17) and the objective lens (18) with an objective axis, is displaced (19) parallel to the direction of movement of the their (6) mounted.