Micro-positioning device; has extension element with predetermined heat expansion co-efficient connected to heat source to produce desired extension in element and device to measure extension

摘要

The device has an extension element (1) made of a material or a mixture of materials with a predetermined heat expansion co-efficient or co-efficients and connected with a heat source (5,6). An adjustment or control device adjusts or controls a heating or cooling element, to give a given extension to the element. A measuring device with a resistance strain gauge (7) determines the extension.