Depositing thin layers in a vacuum using laser deposition supported by a magnetic field comprises vaporizing material from a target with a laser beam and depositing on a substrate

摘要

Depositing thin layers in a vacuum using laser deposition supported by a magnetic field comprises vaporizing material from a target with a laser beam (1) and depositing on a substrate. A magnetic field (3) is produced over the target surface to removed material from the target (2), the field lines of the magnetic field running parallel or partially parallel to the target surface. Preferred Features: The magnetic field produced over the target surface has an inhomogeneous field strength in the direction of the target normals or vertical to them. A laser beam is used which has a grain-like or rectangular focus. An electrical direct or alternating voltage (U) is applied between the target and the substrate.