Protective screen used for an electrostatic holder for processing substrates and wafers in plasma etching devices comprises a holding element for positioning the screen over the electrostatic holder

摘要

Protective screen comprises a holding element (14-1, 14-2) for positioning the screen (10) over the electrostatic holder (16, 18). Preferred Features: The holding element is fixed to the under side of the screen. A support (22) is connected to the screen via the holding element.