Current supply apparatus for bipolar current supply of installation of plasma or surface technology, has DC power packs connected via series circuit of power switches, for separate bridge circuits

摘要

The current supply apparatus includes separate DC power packs connected via series circuit of power switches, for each bridge circuit. For each bridge circuit, at least two DC power packs are provided. The positive and negative outputs of the two DC power packs are connected via a series circuit of two power switches. The output of the bridge circuit for the installation taps off current between the power switches of the two series circuits. Separate control signal processing devices (12,13) for the individual control of the positive and negative output signals are provided. These are combined in separate control circuits and are regulated by a control unit (18), independently of each other.