Production of a monolithic piezo-ceramic multilayered actuator used, e.g., in hydraulic and pneumatic valves has a stacking arrangement encased by a green ceramic foil which is sintered to form a polycrystalline ceramic structure

摘要

Production of a monolithic piezo-ceramic multilayered actuator comprises: initially preparing oxidic raw materials in a powder preparation process; plasticizing the conditioned powder; and molding to form a multilayered stacking arrangement comprising an electrode. The stacking arrangement is encased by a green ceramic foil which is sintered to form a polycrystalline ceramic structure. An independent claim is also included for the monolithic piezo-ceramic multilayered actuator produced having opposite-lying electrodes in contact with electrode surfaces embedded in the stacking arrangement, the outer electrode-free surfaces of the actuators being encased with a ceramic coating. Preferred Features: The ceramic foil has a thickness of 20-100 Micro, preferably 40-50 Micro.