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Half tone phase shift mask green body with transparent film producing a phase difference with respect to light passing directly through transparent substrate and weakens the light intensity on the substrate
Half tone phase shift mask green body with transparent film producing a phase difference with respect to light passing directly through transparent substrate and weakens the light intensity on the substrate
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机译:具有透明膜的半色调相移掩模生坯,其相对于直接通过透明基板的光产生相位差,并减弱基板上的光强度
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摘要
Half tone phase shift mask green body is produced by forming a transparent film which produces a predetermined extent of phase difference with respect to light passing directly through a transparent substrate and weakens the light intensity on the substrate. The transparent film contains silicon, palladium and one of nitrogen, oxygen or hydrogen.
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