Grinding and etching system for plate-shaped objects has clamping table, grinder for grinding plate-shaped objects fixed on table, object washing device and dry etching device

摘要

The device has a clamping table (11) for fixing plate-shaped objects (W), a grinding device (12a,12b) for grinding plate-shaped objects fixed on the clamping table, a washing device (13) for washing the objects after grinding and a dry etching device (14) for dry etching the washed objects. A cassette holder stores several objects prior to grinding.