A method for treating and coating of surfaces of nonconductive, dielectric materials by means of mokrowellenangeregter plasmas and apparatus for carrying out the method

摘要

The present invention relates to a technical solution for treating and coating of surfaces of nonconductive, dielectric materials waves excited by means of microwave plasmas, in the case of the dollar a a) for the formation of the plasma 4 required energy of the wave-guiding hollow structure 1, in which the article to be treated 2 and the microwave technology closed on all sides, by means of a microwave generator 15 is supplied by means of modulated microwaves, dollar a b) the ignition 3 of the plasma 4 by means of an ignition device 11 to a predetermined location, to be spatially separated from the microwaves are injected 5 takes place, dollar a is c) the current, itself advancing, localized plasma 4 within the wave-guiding hollow structure 1 from the location of the ignition 3 over the surfaces to be treated in the direction of the microwaves are injected 5, wherein in the treatment chamber 9 a for the plasma barrel sufficient cavity above the surface to be treated is present, dollars a d) of the plasma treatment in the region of the atmospheric air pressure and above is carried out with a composition suitable for the plasma treatment, which, by means of a device 12 is supplied, dollars a e) the current plasma 4 by means of a device 13 is interrupted as soon as it has passed over the surface to be treated.