Polishing method involves inclining tool at defined angle in direction perpendicular to holding surface and in tool displacement direction, then in direction to reduce elastic deformation

摘要

The method involves tilting the tool shaft by a predetermined angle in a direction perpendicular to the holding surface and in the tool displacement direction in a first step. The tool shaft is inclined in the direction perpendicular to the holding surface and in a direction to reduce elastic deformations of the polishing surface in an area in which the polishing surface is placed on an edge of the surface in a second step. The method involves rotating a polishing tool made of elastic material with a polishing surface against a surface to be polished of an object on a holding table and moving the surface and tool relatively along a holding surface of the table. The tool shaft is inclined by a predetermined angle in a direction perpendicular to the holding surface and in the tool displacement direction in a first step. The tool shaft is inclined in the direction perpendicular to the holding surface and in a direction to reduce elastic deformations of the polishing surface in an area in which the polishing surface is placed on an edge of the surface in a second step. Independent claims are also included for the following: a polishing device.