Radio frequency plasma reactor has distribution chamber with wall opposite metal plate with gas inlet openings distributed along wall and connected to at least one gas feed line to reactor

摘要

The reactor has a reactor container with an electrode pair with opposing metal surfaces defining a plasma discharge chamber. At least one metal surface is the surface of a metal plate with gas feed openings through it to the discharge chamber and from a distribution chamber extending along the plate. The distribution chamber has a wall opposite the plate and gas inlet openings along the wall connected to at least one reactor gas feed line. The RF plasma reactor has a reactor container containing a pair of electrodes consisting of separate opposing metal surfaces that define a plasma discharge chamber (36) between them, whereby at least one metal surface is the surface of a metal plate (40) with a number of gas delivery openings (44) through the surface to the discharge chamber and from a distribution chamber (46a-c) extending along the plate relative to the discharge chamber. The distribution chamber has a wall opposite and at a distance from the plate and a number of gas inlet openings distributed along the wall and connected to at least one gas feed line to the reactor.