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process for the production of a coriolis drehratensensors
process for the production of a coriolis drehratensensors
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机译:科里奥利德雷顿传感器的生产方法
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摘要
A process for the manufacture of a Coriolis rate-of-rotation sensor with oscillatory support masses spring-suspended on a substrate as well as driving means for the excitation of the planar oscillation of the oscillating masses and evaluation means for the determination of a Coriolis acceleration. Oscillating masses, driving means and integrated stops are structured in a common operation by means of plasma etching from a silicon-on-insulator (SOI) wafer.
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