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REQUIREMENTS AND REQUIREMENTS FOR QUALITY REQUIREMENTS

机译:对质量要求的要求和要求

摘要

There are provided an apparatus for and a method of forming a coating film of photosensitive resin on a large-sized glass substrate for LCD color filters such that the coating film is not affected by unevenness of a main surface of the substrate. A substrate (S) is sucked and held by a movable holder (8) with its coated main surface directed downward. Provided below the substrate (S) is an application head (H) having a straight slit (13), through which a coating liquid is discharged upward. When the substrate (S) is relatively moved obliquely upward with a particular clearance (I2) between it and the coating head (H), a coating liquid bead (B) is formed between the slit (13) and the substrate (S) and is moved obliquely downward along the substrate (S) to form a coating film (Rd). A meniscus (L2) of the coating liquid bead (B) facing a higher side of the substrate (S) has a greater height (h2) than that of a meniscus (L1) facing a lower side of the substrate such that the height of the meniscus facing the higher side of the substrate (S) is substantially greater than the thickness of a liquid coating film. IMAGE
机译:提供了一种用于在用于LCD彩色滤光片的大尺寸玻璃基板上形成光敏树脂的涂膜的装置和方法,使得该涂膜不受基板的主表面的不平整影响。衬底(S)被可移动支架(8)抽吸并保持,其涂覆的主表面指向下方。在基板(S)的下方设置有具有直的缝隙(13)的涂布头(H),涂布液通过该缝隙向上排出。当基底(S)相对倾斜地向上移动并在其与涂布头(H)之间具有特定的间隙(I2)时,在狭缝(13)和基底(S)之间形成涂布液珠(B)。沿基板(S)倾斜向下移动以形成涂膜(Rd)。面对基板(S)的较高侧的涂布液珠(B)的弯月面(L2)具有比面对基板的下侧的弯月面(L1)的弯月面(L2)更大的高度,使得面对衬底(S)的较高侧的弯月面实质上大于液体涂膜的厚度。 <图像>

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