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A method for the production of a device by means of a direct irradiation of a few parts of the surface of the apparatus by means of a mask and by means of indirect irradiation of other parts through the mask via a reflecting surface, with the preparation of a pattern
A method for the production of a device by means of a direct irradiation of a few parts of the surface of the apparatus by means of a mask and by means of indirect irradiation of other parts through the mask via a reflecting surface, with the preparation of a pattern