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Optical converter for changing uniform energy wavefront into variable energy wavefront, used, e.g., for semiconductor material crystallization includes zone mask with regions of differing optical transmission
Optical converter for changing uniform energy wavefront into variable energy wavefront, used, e.g., for semiconductor material crystallization includes zone mask with regions of differing optical transmission
The converter comprises a mask (1) with zones (2) of variable width having a first optical transmission coefficient interposed with zones having a second optical transmission coefficient. The converter employs aluminum, chromium, or a thick or a thin layer of silicon.
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