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Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample

机译:用于提高基于探针的仪器测量加热样品的准确性的方法和系统

摘要

A method of operating a probe-based instrument comprises placing a probe of the probe-based instrument in an operative state in which the probe interacts with a heated sample, measuring a parameter of probe operation indicative of a characteristic of the heated sample, and during the measuring step, maintaining interaction between the probe and the heated sample that is substantially free of influences caused by condensation on the probe. The maintaining step includes heating the probe to a temperature at which the measured parameter of probe operation is substantially free of influences caused by condensation on the probe. Heating the probe reduces or eliminates the formation of condensation on the probe from water or materials that have evaporated from the heated sample. The invention is especially useful in connection with atomic force microscopes and other probe-based instruments.
机译:一种操作基于探针的仪器的方法,该方法包括:将基于探针的仪器的探针置于操作状态,在该状态下探针与加热的样品相互作用;测量指示加热样品的特性的探针操作参数;以及在测量步骤中,保持探针和加热的样品之间的相互作用,基本上不因探针上的冷凝而产生影响。维持步骤包括将探针加热到一定温度,在该温度下,探针操作的测量参数基本上不受由探针上的冷凝引起的影响。加热探针可减少或消除从加热的样品中蒸发的水或材料在探针上形成的冷凝水。本发明在与原子力显微镜和其他基于探针的仪器结合时特别有用。

著录项

  • 公开/公告号US2001000279A1

    专利类型

  • 公开/公告日2001-04-19

    原文格式PDF

  • 申请/专利权人 VEECO INSTRUMENTS INC.;

    申请/专利号US20000731308

  • 发明设计人 ROBERT DANIELS;SERGUEI MAGONOV;

    申请日2000-12-06

  • 分类号G21K7/00;G01N23/00;

  • 国家 US

  • 入库时间 2022-08-22 01:07:37

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