A surface acoustic wave device includes a substrate and electrode disposed on the substrate. The electrode has a specific resistance &rgr; of up to about 1 &OHgr;.cm and is made of a ZnO film with a low resistance having an impurity doping. A piezoelectric film having a specific resistance &rgr; of at least about 106 &OHgr;.cm and a lattice constant within approximately ±20% of that of ZnO is disposed on the electrode. An interdigital electrode is disposed on the piezoelectric film.
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