High resolution charged particle-energy detecting, multiple sequential stage, compact, small diameter, retractable cylindrical mirror analyzer system, and method of use

摘要

Disclosed is a compact, small diameter, high resolution charged particle-energy detecting, retractable cylindrical mirror analyzer system. Multiple sequential stages enable charged particle-energy detection with an improved resolution as compared to that possible where only a single stage is utilized. The relatively small size allows for positioning, via a manipulator of the cylindrical mirror analyzer system, which is attached to a linear motion feedthrough mounted on a conflat flange of a vacuum system.