首页>
外国专利>
Mass production of silicon dioxide film by liquid phase deposition method
Mass production of silicon dioxide film by liquid phase deposition method
展开▼
机译:液相沉积法批量生产二氧化硅薄膜
展开▼
页面导航
摘要
著录项
相似文献
摘要
A liquid phase deposition method of mass producing substantially uniform silicon dioxide films on wafers by forming wafer sets from at least four wafers. The wafer sets are placed in a slotted polytetrafluroethylene polymer boat wherein a proper and short distance between the front surface of a wafer and another surface is created. Finally, a substantially uniform silicon dioxide film is deposited on the wafer surfaces by contacting the wafer sets with an aqueous supersaturated silicon dioxide solution comprising a mixture of hydrofluosilicic acid and boric acid.
展开▼