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Method for producing narrow pores and structure having the narrow pores, and narrow pores and structure produced by the method

机译:产生细孔的方法和具有细孔的结构,以及由该方法制得的细孔和结构

摘要

Provided is a method for producing regularly ordered narrow pores excellent in linearity, and a structure with such narrow pores. A method for producing a narrow pore comprises a step of radiating a particle beam onto a workpiece, and a step of carrying out anodic oxidation of the workpiece having been irradiated with the particle beam, to form a narrow pore in the workpiece.
机译:提供了一种用于产生线性度优良的规则排列的细孔的方法以及具有这种细孔的结构。用于产生细孔的方法包括以下步骤:将粒子束辐射到工件上;以及对已经被粒子束照射的工件进行阳极氧化以在工件中形成细孔的步骤。

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