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Method for producing narrow pores and structure having the narrow pores, and narrow pores and structure produced by the method
Method for producing narrow pores and structure having the narrow pores, and narrow pores and structure produced by the method
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机译:产生细孔的方法和具有细孔的结构,以及由该方法制得的细孔和结构
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摘要
Provided is a method for producing regularly ordered narrow pores excellent in linearity, and a structure with such narrow pores. A method for producing a narrow pore comprises a step of radiating a particle beam onto a workpiece, and a step of carrying out anodic oxidation of the workpiece having been irradiated with the particle beam, to form a narrow pore in the workpiece.
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