The infrared ray bolometer which is stabilized structurally

摘要

(57) Abstract The infrared ray bolometer by this invention, in support level (120) and the absorber (132) which possess the conduction belt (124) of 1 pair it was formed to the top of the substrate (112), the joint terminal (114) of 1 pair, and possess conservation formation (116) Drive substrate level (110) and include 1 pair anchor sections (122a), 1 pair trail sections (122b) and one elevated section (122c) the support pier (122) and the support pier which include the integrated circuit taking the bolometer element (136) which is surrounded, is categorized to the lower part of the absorberIt includes with the post (140) of 1 pair it is located between absorption level (130) and absorption level and the support level which possess the IR absorption coat (138) which is located on top of the reflecting layer (134) and the absorber, here the respective post top is installed in the center section of the absorber, lower part is installed in the elevated section of the support pier. The channel (201) or it is formed by the vicinity to absorption level alongside that edge, it prevents the fact that the stress which is accumulated to absorption level is released.