Optical type surface roughness inline survey instrument

摘要

PROBLEM TO BE SOLVED: To perform in-line inspection at a high speed by a simple method by providing an operation controller and the like for determining the measurement starting time and the measurement finishing time for a material under inspection. ;SOLUTION: In a surface processing device 2, a grindstone 2 performs polishing for the surface of a disk 1 (material under inspection) form the control signal from a processing control circuit 2c. When transfer of the disk 1 is detected by a position sensor 6, an operation controller 7 determines the measurement starting time of the surface roughness, adds the elapsed time required for inspection, which is obtained from the preset conveying speed, and determines the finishing time. In a surface roughness sensor 5, laser light as coherent luminous flux is applied on the transferred disk 1, and the scattered reflected light is received by a light receiving element. The signal corresponding to the amount of the received light is outputted to the operation controller 7. The surface roughness is judged whether good or bad. Furthermore in classifying container 3, the good product classified by a carrier 4 is contained in a good-product containing part 8, and the defective part is contained in a defective-product containing part 9.;COPYRIGHT: (C)1998,JPO