Cup rotating type spin coater and cup rotating type coating film formation manner

摘要

PURPOSE: To efficiently remove suspended mist present above an inner cup and to enhance the yield of a product by improving a cup rotating type spin coater synchronously rotating the inner cup having a substrate received therein along with the substrate. ;CONSTITUTION: A cup rotating type spin coater has an inner cup driving part 11 rotationally driving a substrate holding table 16, the inner cup 15 integrally rotated along the substrate holding table 16 and the fixedly arranged outer cup 19 receiving the inner cup 15. In the outer cup 19, a forcible air supply and exhaust mechanism 30 forming down flow within the outer cup 19 at least during the rotation of the inner cup 15 and a forcible air supply and exhaust mechanism 40 supplying air into the inner cup 15 when the substrate is taken out by opening the inner cup 15 are provided.;COPYRIGHT: (C)1994,JPO