Manufacturing method of metal foil ceramic joining material and metal foil laminated ceramic substrate

摘要

The present invention is to provide a method of manufacturing a metal foil ceramic ceramic material capable of preventing the damage of ceramic material to increase the productivity of a metal foil ceramic / ceramic joining material or a metal foil laminated ceramic substrate, and to provide a metal foil laminated ceramic substrate . Therefore, in the present invention, since the ceramic material 13 is heated before the ion etching of the metal foil 11 and the ceramic material 13, respectively, the pressure welding can be easily and reliably performed. Further, since the ceramic material 13 is heated on the holder 14, the ceramic material 13 can be prevented from being destroyed. Further, since the pressing force at the time of pressure welding is set to 1 kg / cm. Sup. 2 or less, destruction of the ceramic material 13 can be prevented from this surface. Accordingly, a high-quality metal foil / ceramic joint member 19 and a metal foil laminated ceramic substrate 20 can be produced at a high production rate.