By the high density radical reaction which uses the rotary electrode the high efficient processed device

摘要

PROBLEM TO BE SOLVED: To provide the highly efficient machining device through the high density radical reaction using and a rotary electrode especially suitable for the machining such as an X-ray mirror for SR beam a CO₂ laser beam mirror which are mirrors for high output beam. ;SOLUTION: An X-axis guide 10 which is formed of the same material as a surface plate 2, high in straightness, and square in section is fixed in the X-axis direction on an upper surface 9 of the surface plate 2 of excellent flatness as an XY-drive mechanism 4 to relatively move a rotary electrode to a work, an X-table 32 and a Y-table 33 are placed on the upper surface of the surface plate 2 which is the same reference surface for both tables in a floating condition with a plurality of static pressure pads 38, the Xtable 32 is moved along the X-axis guide 10 by the static pressure pad 38 in a noncontact condition, the Y-table 33 is moved along an X-axis guide surface 39 provided on the X-table 32 in a non-contact condition by the static pressure pad 38, and the same gas as the atmospheric gas in a chamber is used as the gas to be supplied to the static pressure pads 38.;COPYRIGHT: (C)1999,JPO