Production manner and quantum thin line in quantum thin line and uses that the quantum effective component

摘要

PURPOSE: To provide a quantum fine line and a quantum effect element using thereof, having electronic stability and less crystal deffects and improved mechanical strength, which can be processed easily and can be manufactured at low cost. ;CONSTITUTION: A tapered stripe-like protruding part 11, consisting of the silicon similarly to a substrate, is formed by oxidizing at least the side face of the stripe-like part 111 and the silicon substrate by conducting an etching treatment in stripe form to the prescribed depth leaving the prescribed region of the silicon substrate 1 selectively, and a quantum fine line is manufactured.;COPYRIGHT: (C)1994,JPO&Japio