FAR INFRARED RAY DRYING DEVICE, DRYING DEVICE CONSITUTING BODY, AND DRYING METHOD

摘要

PROBLEM TO BE SOLVED: To prevent the occurrence of breaking of a wire to a fine wiring pattern at a lithography process carried out at an after process for a print substrate by rapidly discharging a solvent in resist ink to the atmosphere from the surface of a print substrate in a state to radiate far infrared rays to resist ink coated on the print substrate.;SOLUTION: Far infrared rays of a wave length of approximate 3-approximate 6 μm is radiated from a far infrared ray radiation layer, having a metal surface, to the print substrate. A pressure medium is sprayed against the substrate such that the temperature of an object to be dried is reduced to 180°C or less.;COPYRIGHT: (C)2002,JPO