Replenishment replenishment method and apparatus

摘要

PURPOSE: To stably replenish a specified amt. of replenisher without depending on the discharging ability of a pump. ;CONSTITUTION: When replenishing is not needed, an electromagnetic valve 84 is closed, while a pump 74 is always operated to circulate the replenisher. Thus, a specified amt. of replenisher is always reserved in a bent pipe 80. When replenishing is needed, a control unit for replenishing 70 is controlled in such a manner that the pump 74 is stopped while the electromagnetic valve 84 is opened. Thus, the replenisher reserved in the bent pipe 80 is supplied to a processing tank 56A through a straight pipe 82 and a first piping 68.;COPYRIGHT: (C)1995,JPO