Surface acoustic wave resonance piece, production method null of surface acoustic wave

摘要

PROBLEM TO BE SOLVED: To manufacture an SAW device for preventing troubles due to a foreign matter in a housing, and for adjusting resonance frequencies. ;SOLUTION: At the manufacturing of a surface acoustic wave resonator, an electrode constituting an IDT (interdigital electrode) is anodized so that a thick oxide film can be formed, and the electrode can be prevented without deteriorating characteristics by this oxide film. Then, resonance frequencies are measured in a state of a wafer, and the anodizing voltage value is changed so that the thickness of the oxide film can be adjusted, and as a result, resonance frequencies (f) can be adjusted.;COPYRIGHT: (C)1999,JPO