DECIDING METHOD FOR REFRACTIVE INDEX DISPERSION AND DECIDING METHOD FOR REFRACTIVE INDEX DISTRIBUTION

摘要

PROBLEM TO BE SOLVED: To provide a deciding method for refractive index dispersion and the deciding method for refractive index distribution by which the optical characteristics of an optical component are accurately obtained.;SOLUTION: The calculated value P1_cal and measured value P1_m of a first optical characteristic calculated by using the composition distribution data of a film thickness direction and the refractive index data of the constituting material of a film are obtained, a first optimization processing is executed with the refractive index data of each material as an optimization parameter so as to make |P1_cal-P1_m| be an allowable value or less and the refractive index of each material is decided. Then, a second optimization processing is executed with film thickness data as the optimization parameter and the film thickness of the film is decided. Thereafter, the calculated value P3_cal and measured value P3_m of a third optical characteristic are obtained for a plurality of different wavelengths, a third optimization processing is executed with a specified refractive index to a reference wavelength as the optimization parameter and the specified refractive index is decided. By using the refractive index of each material, the film thickness and the specified refractive index decided in the optimization processings, the refractive index dispersion is obtained.;COPYRIGHT: (C)2002,JPO