ION IMPLANTATION DEVICE, WAVEGUIDE AND MASS ANALYZER THEREFOR, AND METHOD OF DISTRIBUTING MICROWAVE OUTPUT TO MASS ANALYZER

摘要

PROBLEM TO BE SOLVED: To provide an ion implantation device, a waveguide and a mass analyzer therefor, and a method of distributing microwave output to a beam guide of the mass analyzer.;SOLUTION: The ion implantation device according to the invention comprises a beam guide 200 of mass analysis magnet, a power source for providing electric field, and a magnetic device 170 providing a multicusped magnetic field and having multiple magnets 220. The power source and the magnets 220 interact with each other and cause resonance of an electron cyclotron along a passage. The multicusped magnetic field is superimposed on the dipole field at a specified field strength in the passage of the mass analyzer where it interacts with the electric field of RF or microwaves. The waveguide 250 according to the invention combines the electric field with beam plasma along the passage of the mass analyzer, thereby improving the ECR status. In the invention, beam plasma is enhanced in the dipole field of the mass analyzer for low-energy ion beams, without introducing plasma generated outside.;COPYRIGHT: (C)2002,JPO