METHOD AND DEVICE FOR OPTIMIZING OPTICAL SYSTEM, AND RECORDING MEDIUM RECORDING PROGRAM FOR OPTIMIZING OPTICAL SYSTEM

摘要

PROBLEM TO BE SOLVED: To efficiently optimize optical characteristics of strong nonlinear properties, such as MTF, at a high speed as compared with conventional practice.;SOLUTION: The optimal solution of an optical system is obtained by using a merit function, with which aberration is set as an evaluation object by a first optimization part 32. Next, the weight and target value with respect to the aberration included in merit function are adjusted automatically, so that evaluation for the MTF or the like approximates a desired value. The optimization of the optical system is re-performed, by using the weight and the target value automatically adjusted by the first optimization part 32. Thus, a function equal to a work, such as the adjustments of the weight and the target value conventionally performed by a designer, is automated.;COPYRIGHT: (C)2002,JPO