INFINITESIMAL FORCE MEASURING METHOD AND INFINITESIMAL FORCE MEASURING INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide an infinitesimal force measuring instrument allowing its range to be widened with its measurement accuracy maintainedd.;SOLUTION: This infinitesimal force measuring instrument has strain sensors formed of monocrystalline silicon (Si) integrally with a straining body. The plurality of strain sensors are formed integrally with the straining body so as to be disposed in positions different in stress concentration. Relations among infinitesimal forces are measured by the plurality of integrally formed strain sensors.;COPYRIGHT: (C)2002,JPO