ULTRASONIC WAVE OSCILLATING ELEMENT, ULTRASONIC WAVE PROBE HEAD, MANUFACTURING METHOD FOR THE ULTRASONIC WAVE PROBE HEAD, AND ULTRASONIC WAVE DIAGNOSTIC DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an ultrasonic wave oscillating element with arranged oscillating directions in ultrasonic waves and high resolution without heat generation, to provide an ultrasonic wave oscillation probe head, an ultrasonic wave diagnostic device and a manufacturing method for the ultrasonic wave oscillating element as above.;SOLUTION: An inserted electrode layer on a piezoelectric material plate 12 is formed and patterning the result is conducted repetitively, and the inserted electrode layer is inserted to a boundary face of the piezoelectric material plates so as to form a laminator consisting of layers of a prescribed number. Dicing is applied to the laminator to cut grooves and a metallic layer is formed to the grooves so as to manufacture the ultrasonic wave probe head where the ultrasonic wave oscillating elements 10, 10, etc., are placed at once in a planar way while interdigital electrodes with the inserted electrode layers inserted to the boundary face of piezoelectric material plates are whirly placed.;COPYRIGHT: (C)2002,JPO