Consists of the vapor phase synthetic diamond film and this vapor phase synthetic diamond film the mask null for x-ray exposure

摘要

PURPOSE:To provide a vapor phase synthesized diamond film excellent in translucency and a mask for X-ray exposure made of the diamond CONSTITUTION:The objective vapor phase synthesized diamond film excellent in translucency has 30-100nm grain diameter, =80nm surface roughness, =10% ratio of the Raman intensity of the nondiamond component to that of the diamond and 4-10cm-1 half-width of the Raman peak of the diamond. The objective mask for X-ray exposure is made of the vapor phase synthesized diamond film.