ILLUMINATION/IMAGE FORMING DEVICE IN PLURAL SPECTRAL RANGES AND COORDINATE MEASURING INSTRUMENT PROVIDED WITH THE ILLUMINATION/IMAGE FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an illumination/image forming device suited to plural spectral ranges.;SOLUTION: The illumination/image forming device is provided with an objective lens (21) determining an optical axis (20), a beam splitter module (32) arranged on the optical axis (20), plural light sources (35) each of which constitutes the start point of one illuminating optical path (35a, 35b or 35c), and plural detectors (34) each of which is attached to one image forming optical path (34a or 34b). The illuminating optical paths (35a to 35c) and the image forming optical paths (34a, 34b) have a common optical section and the beam splitter module (32) is arranged in the optical section.;COPYRIGHT: (C)2002,JPO