DEVICE AND METHOD FOR APPLYING POLISHING JET SURFACE TREATMENT TO DEEP RECESSED SURFACE USING MAGNETO RHEOLOGICAL FLUID

摘要

PROBLEM TO BE SOLVED: To provide a means capable of delivering jet of a cured magneto rheological fluid and polishing a deep recessed surface substrate.;SOLUTION: This device comprises an elastic solenoid formed of a plurality of electric coils around an axial space separated from a work piece and a means for supplying the magneto rheological fluid to the axial space. The device has a nozzle that is disposed in the axial space, receives the magneto rheological fluid, collimates, and injects the fluid as a jet from the axial space. The nozzle is made of ferromagnetic material, and thus shields the fluid to prevent curing of the fluid due to a magnetic field of the solenoid while the fluid exists in the nozzle. The nozzle has a projecting tip for focusing the fluid to one point, a magnetic field is produced at and near the projecting tip, and a free space for generating at least a part of the curing is formed between the projecting tip of the nozzle and an outer end of the axial space.;COPYRIGHT: (C)2002,JPO