SLIT MEMBER AND SLIT ASSEMBLY

摘要

PROBLEM TO BE SOLVED: To provide a slit member, having sufficiently high flatness and capable of suppressing the influence of outgoing light from a light outgoing point other than a light outgoing point, to be a measuring target to a measured result of a light quantity measuring instrument, while fully accurately positioning the light outgoing member with respect to a slit member, capable of restricting an optical path rushing into the light quantity measuring instrument by arranging the slit member between a light outgoing point and the light quantity measuring instrument.;SOLUTION: The slit member 34 is constituted of a metal base material and a metallic film member 34a, formed on the surface of the base material by electrolytic plating, and the film member 34a is constituted of a metal whose reflection index is lower than that of a metal constituting the base material.;COPYRIGHT: (C)2002,JPO